Preparación y propiedades ópticas de películas multicapas ZrO2/Ag/ZrO2 depositadas por evaporación de haz de electrones

Jesús A. Rodríguez, B. Conquet, Ch. Power

Resumen


En este trabajo se presenta la preparación de películas multicapas ZrO2/Ag/ZrO2 depositadas a temperatura ambiente sobre sustratos de vidrio comercial soda-lime por evaporación mediante haz de electrones, como candidatos para aplicaciones en espejos transparentes reflectantes de calor (THM). Las propiedades ópticas de transmitancia y reflectancia se investigaron en función de los espesores de la capas componentes de Ag y ZrO2, estos se variaron para lograr una alta transmitancia vi-sible y una reflectancia máxima en el NIR en los sistemas dieléctrico/metal/dieléctrico (D/M/D). La película multicapa ZrO2(45nm)/Ag(22nm)/ZrO2(45nm) optimizada presentó una alta transmitancia visible de 73% y alta reflectancia NIR 92% con una figura de mérito factor-Z máxima de 0,56 y una longitud de onda de corte ?c de 807 nm mostrando la mejor selectividad espectral como recubrimiento THM.

Recibido: 09/12/2020
Revisado: 25/03/2021
Aceptado: 14/04/2021


Palabras clave


espejo de calor transparente; divisor de haz; películas delgadas; transmitancia; evaporación por haz de electrones

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Referencias


J Gonzáles-Hernández, BS Chao, SR Ovshinsky, DD Allred. The Structure of W/C (0.15<?<0.8) multilayers Annealed in argon or air. Journal of X-Ray Science and Technology, 6(1), 1-31 (1996).

D Bhattacharyya, NK Sahoo, S Thakur, NC Das. Spectroscopic ellipsometry of multilayer dielectric coatings. Vacuum, 60(4), 419-424 (2001).

WH Lowdermilk, D Milam, F Rainer. Optical coatings for laser fusion applications. Thin Solid Films, 73(1), 155-166 (1980).

HJ Qi, LH Huang, ZS Tang, CF Cheng, JD Shao, ZX Fan. Roughness evolution of ZrO2 thin films grown by reactive ion beam sputtering. Thin Solid Films, 444(1), 146-152 (2003).

S Shao, Z Fan, J Shao, H He. Evolutions of residual stress and microstructure in ZrO2 thin films deposited at different tempera-tures and rates. Thin Solid Films, 445(1), 59-62 (2003).

A Hojabri. Structural and optical characterization of ZrO2 thin films grown on silicon and quartz substrates. Journal of Theo-retical and Applied Physics, 10(3), 219-224 (2016).

C Lee, S Chen, C Jaing. Optical monitoring of silver-based transparent heat mirrors. Applied Optics, 35(28), 5698-5703 (1996).

CC Fan, J Bachner. Transparent heat mirrors for solar-energy applications. Applied Optics, 15(4), 1012-1017 (1976).

MF Al-Kuhaili, AH Al-Aswad, SM Durrani, IA Bakhtiari. Energy-saving transparent heat mirrors based on tungsten oxide-gold WO3/Au/WO3 multilayer structures. Solar Energy, 86(11), 3183-3189 (2012).

GK Dalapati, SM Panah, ST Chua, M Sharma, TI Wong, HR Tan, et al. Color tunable low cost transparent heat reflector us-ing copper and titanium oxide for energy saving application. Scientific Reports, 6(1), 1-14 (2016).

CG Granqvist. Electrochromics for smart windows: Oxide- based thin films and devices. Thin Solid Films, 564(15), 1-38 (2014).

MM Hasan, AB Malek, AS Haseeb, HH Masjuki. Investigations on TiO2 and Ag based single and multilayer films for window glazings. Journal of Engineering and Applied Sciences, 5(9), 22-28 (2010).

H Kostlin, G. Frank. Optimization of transparent heat mirrors based on a thin silver film between antireflection films. Thin Solid Films, 89(3), 287-293 (1982).

CM Lampert. Heat mirror coatings for energy conserving win-dows. Solar Energy Materials, 6(1), 1-41 (1981).

AM Al-Shukri. Thin film coated energy-efficient glass windows for warm climates. Desalination, 209(1), 290-297 (2007).

MF Al-Kuhaili, AH Al-Aswad, SM Durrani, IA Bakhtiari. Transparent heat mirrors based on tungsten oxide-silver multi-layer structures. Solar Energy, 83(9), 1571-1577 (2009).

HJ Kim, KW Seo, YH Kim, J Choi, H Kim. Direct laser pattern-ing of transparent ITO-Ag-ITO multilayer anodes for organic solar cells. Applied Surface Science, 328(5), 215-221 (2015).

M Alam, M Rahman, M Basher, M Vasiliev, K Alameh. Optical and chromaticity properties of metal-dielectric composite-based multilayer thin-film structures prepared by rf magnetron sputter-ing. Coatings, 10(3), 251-254 (2020).

D Dimova, K Lovchinov, M Petrov, D Karashanova, O Ange-lov. Structural, optical and electrical properties of multilayer stacks ZnO:Al/Ag/ZnO:Al and ZrO2/Ag/ZrO2. Energy Procedia, 60(17), 143-147 (2014).

J Domaradzki, D Kaczmarek, M Mazur, D Wojcieszak, J Halarewicz, S Glodek, et al. Investigations of optical and sur-face properties of Ag single thin film coating as semitransparent heat reflective mirror. Materials Science-Poland, 34(4), 747-753 (2016).

S Wu, H Zhang, G Tian, Z Xia, J Shao, Z Fan. Y2O3 stabilized ZrO2 thin films deposited by electron beam evaporation: Struc-tural, morphological characterization and laser induced damage threshold. Applied Surface Science, 253(3), 1561-1565 (2006).

S Larouche, L Martinu. OpenFilters: open-source software for the design, optimization, and synthesis of optical filters. Ap-plied optics, 47(13), C219-C230 (2008).

SM Durrani, EE Khawaja, AM Al-Shukri, MF Al-Kuhaili. Dielectric/Ag/dielectric coated energy-efficient glass windows for warm climates. Energy and Buildings, 36(9), 891-898 (2004).

WJ Shin, WH Huang, M Tao. Low-cost spray-deposited ZrO2 for antireflection in Si solar cells. Materials Chemistry and Physics, 230(10), 37-43 (2019).

Z Wang, X Cai, Q Chen, L Li. Optical properties of metal-dielectric multilayers in the near UV region. Vaccum, 80(5), 438-443 (2006).

H Lee, J Na, Y Moon, T Seong, S Kim. Design of near-unity transmittance dielectric/Ag/ITO electrodes for GaN-based light-emitting diodes. Current Applied Physics, 15(7), 833-838 (2015).

K Hong, K Kim, S Kim, I Lee, H Cho, S Yoo, et al. Optical properties of WO3/Ag/WO3 multilayer as transparent cathode in top-emitting organic light emitting diodes. The Journal of Physical Chemistry C, 115(8), 3453-3459 (2011).

K Lin, R Lin, W Hsiao, Y Kang, C Chou, Y Wang. Effects of the structural properties of metal oxide/Ag/metal oxide multi-layer transparent electrodes on their optoelectronic perfomances. Journal of Materials Science: Materials in Electronics, 28(16), 12363-12371 (2017).

H Nezhad, H Haratizadeh, M Kari. Influence of Ag mid-layer in the optical and thermal properties of ZnO/Ag/ZnO thin films on the glass used in buildings as insulating glass unit (IGU). Ce-ramics International, 45(8), 9950-9954 (2019).

X Ju, Z Wang, G Flamant, P Li, W Zhao. Numerical analysis and optimization of a spectrum splitting concentration photovol-taic-thermoelectric hybrid system. Solar Energy, 86(6), 1941-1954 (2012).




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ISSN: 1856-5301

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